Semiconductor Metrology

Nova (Nova Measuring Instruments)

Nova, headquartered in Rehovot, Israel, is a leading provider of process control solutions for the semiconductor manufacturing industry, specialising in optical and X-ray metrology systems that measure critical dimensions, film thickness, and overlay accuracy at the nanometre scale. As semiconductor nodes advance below 3 nm, precise metrology becomes the limiting factor in yield, and Nova's portfolio — including the Prism optical CD metrology system and the NOVA-T500 X-ray metrology platform — is deployed at leading logic and memory fabs worldwide. Nova collaborates with Israeli universities (Weizmann Institute, Technion) and international semiconductor research institutes on scatterometry models, machine-learning-assisted metrology, and EUV mask inspection methods. Its CelestIA product applies deep-learning algorithms to extract process parameters from optical spectra, and the underlying algorithms are developed in partnership with academic machine-learning groups.